Electronics Manufacturing

  1. Law
  2. CFR 40
  3. Protection of Environment
  4. Environmental Protection Agency
  5. Air Programs
  6. Mandatory Greenhouse Gas Reporting
  7. Electronics Manufacturing

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Section
98.90

Definition of the source category.

Section
98.91

Reporting threshold.

Section
98.92

GHGs to report.

Section
98.93

Calculating GHG emissions.

Section
98.94

Monitoring and QA/QC requirements.

Section
98.95

Procedures for estimating missing data.

Appendix
Table I-1 to Subpart I of Part 98

Default Emission Factors for Threshold Applicability Determination

Appendix
Table I-2 to Subpart I of Part 98

Examples of Fluorinated GHGs Used by the Electronics Industry

Appendix
Table I-3 to Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for Semiconductor Manufacturing for 150 mm and 200 mm Wafer Sizes

Appendix
Table I-4 to Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for Semiconductor Manufacturing for 300 mm and 450 mm Wafer Size

Appendix
Table I-5 to Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for MEMS Manufacturing

Appendix
Table I-6 to Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for LCD Manufacturing

Appendix
Table I-7 To Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for PV Manufacturing

Appendix
Table I-8 to Subpart I of Part 98

Default Emission Factors (1-U<sub>N2O,j</sub>) for N<sub>2</sub>O Utilization (U<sub>N2O,j</sub>)

Appendix
Table I-9 to Subpart I of Part 98

Methods and Procedures for Conducting Emissions Test for Stack Systems

Appendix
Table I-10 to Subpart I of Part 98

Maximum Field Detection Limits Applicable to Fluorinated GHG Concentration Measurements for Stack Systems

Appendix
Table I-11 to Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for Semiconductor Manufacturing for Use With the Stack Test Method (150 mm and 200 mm Wafers)

Appendix
Table I-12 to Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for Semiconductor Manufacturing for Use With the Stack Test Method (300 mm and 450 mm Wafers)

Appendix
Table I-13 to Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for LCD Manufacturing for Use With the Stack Test Method

Appendix
Table I-14 to Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for PV Manufacturing for Use With the Stack Test Method

Appendix
Table I-15 to Subpart I of Part 98

Default Emission Factors (1-U<sub>ij</sub>) for Gas Utilization Rates (U<sub>ij</sub>) and By-Product Formation Rates (B<sub>ijk</sub>) for MEMS Manufacturing for Use With the Stack Test Method

Appendix
Table I-16 to Subpart I of Part 98

Default Emission Destruction or Removal Efficiency (DRE) Factors for Electronics Manufacturing

Appendix
Table I-17 to Subpart I of Part 98

Expected and Possible By-Products for Electronics Manufacturinglg

Appendix
Appendix A to Subpart I of Part 98

Alternative Procedures for Measuring Point-of-Use Abatement Device Destruction or Removal Efficiency

Section
98.96

Data reporting requirements.

Section
98.97

Records that must be retained.

Section
98.98

Definitions.