New source performance standards (NSPS).

  1. Law
  2. CFR 40
  3. Protection of Environment
  4. Environmental Protection Agency
  5. Effluent Guidelines and Standards
  6. Electrical and Electronic Components Point Source Category
  7. Semiconductor Subcategory
  8. New source performance standards (NSPS).

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§ 469.17 New source performance standards (NSPS).

Any new source subject to this subpart must achieve the following new source performance standards (NSPS).

Subpart A - Semiconductor NSPS Effluent Limitations

Pollutant or pollutant property Maximum for any 1 day Average of daily values for 30 consecutive days
Milligrams per liter (mg/l)
TTO1 1.37 (2)
Fluoride (T) 32.0 17.4
pH (2) (3)

1 Total toxic organics.

2 Not applicable.

3 Within the range of 6.0 to 9.0.


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